Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate GlassesPublisher: Springer Nature Year: 27/11/2013 ISBN: 9781461511656 Publication form: eBook: Reflowable eTextbook (ePub)
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Listening to the LogosPublisher: University of South Carolina Press Year: 23/07/2012 ISBN: 9781611171754 Publication form: eBook: Reflowable eTextbook (ePub)
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect TechnologyPublisher: Springer, Berlin ISBN: 9781402071935 Publication form: hardback
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect TechnologyPublisher: Springer, Berlin ISBN: 9781461354246 Publication form: paperback
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