Authors | |
Publisher | Springer, Berlin |
Year | |
Pages | 288 |
Version | hardback |
Language | English |
ISBN | 9783030232986 |
Categories | Electronic devices & materials |
Flash Lamp Annealing: From Basics to Applications
Introduction.- Technological background.- Basic components.- Flash lamps.- Process management and process control.- FLA assisted deposition.- Temperature.- Thermal budget.- Temperature measurements.- Temperature simulations.- FLA for semiconductors.- Defect engineering.- Doping.- Crystallization.- Semiconductor nanostructures.- Beyond semiconductors.- Transparent conducting oxides.- Metallic films.- High-k materials and dielectrics.- Flexible substrates.- Outlook.