Książki

Fundamentals of Semiconductor Fabrication provides an introduction to semiconductor fabrication technology, from crystal growth to integrated devices and circuits. It includes theoretical and practical aspects of all major fabrication steps, making it a useful reference tool when students enter the semiconductor industry. Each chapter begins with an introduction and a list of learning goals, and each chapter ends with a summary of important concepts and suggested homework problems.

Fundamentals of Semiconductor Fabrication

* Introduction* Crystal Growth* Silicon Oxidation* Photolithography* Etching* Diffusion* Ion Implantation* Film Deposition* Process Integration* IC Manufacturing* Future Trends and ChallengesAppendix A: List of SymbolsAppendix B: International System of UnitsAppendix C: Unit PrefixesAppendix D: Greek AlphabetAppendix E: Physical ConstantsAppendix F: Properties of Si and GaAs at 300KAppendix G: Properties of the Error FunctionAppendix H: Basic Kinetic Theory of GasAppendix I: SUPREM CommandsAppendix J: Percentage Points of the t DistributionAppendix K: Percentage Points of the F Distribution