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Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.
Handbook of VLSI Microlithography
Issues and Trends Affecting Lithography Tool Selection Strategy
Resist Technology u Design, Processing, and Applications
Lithography Process Monitoring and Defect Detection
Techniques and Tools for Photo Metrology
Techniques and Tools for Optical Lithography
Microlithography Tool Automation
Electron-Beam ULSI Applications
Rational Vibration and Structural Dynamics for Lithographic Tool Installations
Applications of Ion Microbeams Lithography and Direct Processing
X-Ray Lithography
Part I
Part II
Acknowledgment
References
Index