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DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs

DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs

Autorzy
Wydawnictwo Springer, Berlin
Data wydania
Liczba stron 188
Forma publikacji książka w miękkiej oprawie
Język angielski
ISBN 9783030330750
Kategorie Obwody i komponenty
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Opis książki

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. 

DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs

Spis treści

Introduction.- National Nanotechnology Coordinated Infrastructure (NNCI).- Working in a Cleanroom.- MEMS Fabrication Process.- Equipment.- Tools and Supplies.- Designing for MEMS.- Soft Materials.- Imaging & Metrology.- Testing.- Transporting.- Regulatory Approval Pathways.- Locations of the Facilities.- Meet the Lab Directors.- Collaborating with a Facility.- International Options.- Intellectual Property.- Getting Project Assistance.- Costs.- Taking the First Steps

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