Autorzy | |
Wydawnictwo | De Gruyter |
Data wydania | 2021 |
Liczba stron | 105 |
Forma publikacji | książka w miękkiej oprawie |
Język | angielski |
ISBN | 9783110712513 |
Kategorie | Nauka o materiałach |
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Chemistry of Atomic Layer Deposition