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Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of problems that involve reliable modeling, analysis and design, Analytical models with correct dependences on service dimensions, Cantilever based systems for nanofabrication researchers and designers, and Dynamics of complex spring and beam microsystems. This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.  An instructor's solution manual is available on the book's webpage at springer.com. Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

Dynamics of Microelectromechanical Systems