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Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

Handbook of VLSI Microlithography

Issues and Trends Affecting Lithography Tool Selection Strategy

Resist Technology u Design, Processing, and Applications

Lithography Process Monitoring and Defect Detection

Techniques and Tools for Photo Metrology

Techniques and Tools for Optical Lithography

Microlithography Tool Automation

Electron-Beam ULSI Applications

Rational Vibration and Structural Dynamics for Lithographic Tool Installations

Applications of Ion Microbeams Lithography and Direct Processing

X-Ray Lithography

Part I

Part II

Acknowledgment

References

Index