Silicon Sensors and Actuators: The Feynman Roadmap

Authors	Benedetto Vigna Paolo Ferrarini Flavio Francesco Villa Paolo Ferrari
Publisher	Springer Nature Switzerland AG
Year	13/04/2022
Pages	997
Version	hardback
Readership level	Professional and scholarly
Language	English
ISBN	9783030801342
Categories	Precision instruments manufacture

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Book description

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges.

Silicon Sensors and Actuators: The Feynman Roadmap