Die Bildung von Festkörpern, ihre Struktur und damit ihr makroskopisches Verhalten wird durch kinetische Gesetzmäßigkeiten bestimmt. Dieses Buch erläutert Ihnen die atomaren Grundlagen von Prozessen wie Kristallwachstum, Diffusion und Phasenumwandlungen mithilfe von Näherungsverfahren, die in der Praxis häufig angewendet werden. Neben Metallen und Legierungen werden die für die moderne Halbleitertechnik besonders wichtigen dünnen Schichten und Kristalle ausführlich besprochen.
Kinetic Processes: Crystal Growth, Diffusion, and Phase Transformations in Materials
Table of contents
Preface to the First EditionPreface to the Second EditionINTRODUCTIONArrhenius PlotThe Relationship between Kinetics and ThermodynamicsThe Boltzmann DistributionKinetic Theory of GasesCollisionsDIFFUSION IN FLUIDSDiffusion in a GasDiffusion in LiquidsDIFFUSION IN AMORPHOUS MATERIALSAmorphous MaterialsNetwork Glass FormersThe Glass TransitionThe Free Volume ModelFictive TemperatureDiffusion in PolymersThe Stokes-Einstein RelationshipDIFFUSION IN CRYSTALSDiffusion in a CrystalDiffusion Mechanisms in CrystalsEquilibrium Concentration of VacanciesSimmons and Balluffi ExperimentIonic and Covalent CrystalsStoichiometryMeasurement of Diffuion CoefficientsSurface DiffusionDiffusion in Grain BoundariesKirkendall EffectWhisker GrowthElectromigrationDIFFUSION IN SEMICONDUCTORSIntroductionDiffusion in SiliconDiffusion of Zinc in GaAsRecombination Enhanced DiffusionDoping of SemiconductorsPoint Defect Generation in Silicon during Crystal GrowthMigration of Interstitials (and Liquid Droplets) in a Temperature GradientOxygen in SiliconGetteringSolid-State DopingION IMPLANTATIONIntroductionIon InteractionsImplantation DamageRutherford BackscatteringChannelingSilicon-on-InsulatorMATHEMATICS OF DIFFUSIONRandom WalkThe Diffusion EquationSolutions to the Diffusion EquationNumerical MethodsBoltzmann-Matano AnalysisDiffusion During Phase SeparationSTEFAN PROBLEMSSteady State Solutions to the Diffusion EquationDeal-Grove AnalysisDiffusion Controlled Growth of a Spherical PrecipitateDiffusion Limited Growth in Cylindrical CoordinatesDiffuion Controlled Growth of a PrecipitatePHASE TRANSFORMATIONSTransformation Rate Limited GrowthDiffuion Limited GrowthThermally Limited GrowthCasting of MetalsOperating PointCRYSTAL GROWTH METHODSMelt GrowthSolution GrowthVapor Phase GrowthStoichiometrySEGREGATIONSegregation During a Phase ChangeLever RuleScheil EquationZone RefiningDiffusion at a Moving InterfaceSegregation in Three DimensionsBurton, Primm and Schlicter AnalysisINTERFACE INSTABILITIESConstitutional SupercoolingMullins and Sekerka Linear Instability AnalysisAnisotropic INterface KineticsCHEMICAL REACTION RATE THEORYThe Equilibrium ConstantReaction Rate TheoryReaction Rate ConstantTransition State TheoryExperimental Determination of the Order of a ReactionNet Rate of ReactionCatalysisQuasi-Equilibrium Model for the Rate of a First Order Phase ChangePHASE EQUILIBRIAFirst Order Phase ChangesSecond Order Phase ChangesCritical Point Between Liquid and Vapor NUCLEATIONHomogenous NucleationHeterogeneous NucleationJohnson-Mehl-Avrami EquationSURFACE LAYERSLangmuir AdsorptionCVD Growth by a Surface Decomposition ReactionLangmuir-Hinschelwood ReactionSurface NucleationThin FilmsSurface ReconstructionAmorphous DepositsSurface ModificationFractal DepositsStrain Energy and Misfit DislocationsStrained Layer GrowthTHIN FILM DEPOSITIONLiquid Phase EpitaxyGrowth Configuration for LPEChemical Vapor DepositionMetal-Organic Chemical Vapor DepositionPhysical Vapor DepositionSputter DepositionMetallizationLaser AblationMolecular Beam EpitaxyAtomic Layer EpitaxyPLASMASDirect Current (DC) PlasmasRadio Frequency PlasmasPlasma EtchingPlasma ReactorsMagnetron SputteringElectron Cyclotron ResonanceIon MillingRAPID THERMAL PROCESSINGIntroductionRapid Thermal Processing EquipmentRadiative HeatingTemperature MeasurementThermal StressLaser HeatingKINETICS OF FIRST ORDER PHASE TRANSFORMATIONSGeneral ConsiderationsThe Macroscopic Shape of CrystalsGeneral Equation for the Growth Rate of CrystalsKinetic Driving ForceVapor Phase GrowthMelt GrowthMolecular Dynamics Studies of Melt Crystallization KineticsThe Kossel-Stranski ModelNucleation of LayersGrowth on Screw DislocationsThe Fluctuation Dissipation TheoremTHE SURFACE ROUGHENING TRANSITIONSurface RoughnessThe Ising ModelCooperative ProcessesMonte Carlo Simulations of CrystallizationEquilibrium Surface StructureComputer SimulationsGrowth MorphologiesKinetic RougheningPolymer CrystallizationALLOYS: THERMODYNAMICS AND KINETICSCrystallization of AlloysPhase EquilibriaRegular Solution ModelNear Equilibrium ConditionsPhase DiagramsThe DLP ModelPHASE SEPARATION AND ORDERINGPhase Separation versus OrderingPhase SeparationThe Spinodal in a Regular SolutionAnalytical Model for Diffusion during Spinodal DecompositionMicrostructure DevelopmentModeling of Phase Separation and OrderingNON-EQUILIBRIUM CRYSTALLIZATION OF ALLOYSNon Equilibrium CrystallizationExperimentComputer ModelingAnalytical ModelComparison with ExperimentCrystallization of GlassesCOARSENING, RIPENINGCoarseningFree Energy of a Small ParticleCoarsening in a SolutionCoarsening of Dendritic StructuresSinteringBubblesGrain BoundariesScrath SmoothingDENDRITESDendritic GrowthConditions for Dendritic GrowthSimple Dendrite ModelPhase Field ModelingFaceted GrowthDistribution CoefficientEUTECTICSEutectic Phase DiagramClasses of Eutectic MicrostructuresAnalysis of Lamellar EutecticsOff-Composition EutecticsCoupled GrowthThird Component ElementsCASTINGSGrain Structure of CastingsDendrite Re-Melting
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