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Interface phenomena are most fascinating because of the mixing of different scales and the interference of diverse physical processes. This makes it necessary to use different levels of description: microscopic, kinetic, and gas-dynamical. A unified quasiclassical approach is used to answer practical questions dealing with inelastic gas-surface scattering, the kinetics of adsorption layers, the evolution of inhomogeneities and defects at the surface, the Knudsen layer, the development of boundary conditions on the kinetic and gas-dynamical levels, the determination of exchange and slip coefficients, and so on.

Interaction of Gases with Surfaces: Detailed Description of Elementary Processes and Kinetics

Inelastic Scattering of Molecules from Crystal Surfaces.- General Semiclassical Theory of Gas-Surface Scattering.- Dynamic Structural Factors of Phonon Scattering.- Multiphonon Scattering.- Scattering from Rough Surfaces.- Concluding Remarks on Quasiclassical Approach to Gas-Surface Scattering.- Microscopic Models of Detailed Kinetics of Adsorption.- Microscopic Models of Detailed Kinetics.- Physical Models of Elementary Processes, Transition Probabilities, and Kinetic Coefficients.- Different Regimes of Adsorption Kinetics.- Equilibrium and Quasiequilibrium Solutions to the LG Model.- Thermodynamical Description of Adsorbed Layer Dynamics.- Phenomenological Models of Thin Film Growth at Solid Surfaces.- Classical Model of Nucleation and Nuclei Growth at Substrate.- Lateral Growth of Island Films.- Calculations of Thin Films Growth Kinetics.- Kinetic Boundary Condition (KBC) and Inverse Scattering Problem.- KBC for Distribution Function in Gas Phase.- Inverse Scattering Problem in Gas-Surface Interaction.