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Ultra-precision machining is a promising solution for achieving excellent machined surface quality and sophisticated micro/nano-structures that influence the applications of components and devices. Further, given the ultrathin layer of material removed, it is a highly coupled process between cutting tool and material. In this book, scientists in the fields of mechanical engineering and materials science from China, Ukraine, Japan, Singapore present their latest research findings regarding the simulation and experiment of material-oriented ultra-precision machining. Covering various machining methods (cutting, grinding, polishing, ion beam and laser machining) and materials (metal, semiconductor and hard-brittle ceramics), it mainly focuses on the evaluation of the fundamental mechanisms and their implementation in processing optimization for different materials. It is of significant theoretical and practical value for guiding the fabrication of ultra-smooth and functional surfaces using ultra-precision machining.

Simulation and Experiments of Material-Oriented Ultra-Precision Machining

Fundamentals of nanometric cutting of nanotwinned copper.- Investigation into plastic deformation and machining induced subsurface damage of high-entropy alloys.- Investigation into the realization of a single atomic layer removal in nanoscale mechanical machining of single crystalline copper.- Theoretical and experimental study of thermally assisted microcutting of brittle single crystal materials.- Cutting mechanism and surface formation of ultra-precision raster fly cutting.- Modeling and experimental study of surfaces optoelectronic elements from crystal materials in polishing.- Advanced applications of elliptical vibration cutting in micro/nano machining.- Ultra-precision machining of hard and brittle materials with coarse-grained grinding wheels.- Processing of high-precision ceramic balls in guide V-grooves with a variable curvature.- The contribution of ion plasma sprayed coating to performance of precision diamond dressing tools.